MSc Intelligent Semiconductor Manufacturing

Year of Entry


Application Deadline

Application Closed

Mode of Study


Mode of Funding


Indicative Intake Target


Minimum No. of Credits Required


Class Schedule

Weekday evenings
(Evening classes normally start at 7:00 p.m.)

Normal Study Period

Full-time: 1 year;
Part-time: 2 years;

Maximum Study Period

Full-time: 2.5 years;
Part-time/Combined mode: 5 years;

Mode of Processing

Applications are processed on a rolling basis. Review of applications will start before the deadline and continue until all places are filled. Early applications are therefore strongly encouraged.
Programme Leader
Prof Prof. Feng Shien Ping
BS, MS, PhD (NTHU), Postdoc (MIT) FRSC, FIMMM, CSci, CEng
3442 8413
General Enquiries
3442 9321
3442 0173
Programme Aims and Objectives

Semiconductors are everywhere – from the processor and AI chips in our smartphones to electronic devices for electric and autonomous vehicles, to new sensors for healthcare. Training required for manufacturing and semiconductor technology is developing rapidly in a wide range of fields. Besides the semiconductor manufacturing process, the semiconductor industry is capital-intensive and must focus on realistic needs for manufacturing intelligence, including new fab construction, technology migration, capacity transformation and expansion, tool procurement, and outsourcing. Recently, semiconductor manufacturing has also become a global geopolitical battleground. Thus, there is a need for professional education to train engineers in Hong Kong and mainland China to acquire the capabilities of intelligent and semiconductor manufacturing.

The programme is designed to provide students with knowledge/skills in process control/operations, electronic and advanced packaging technologies, and materials in intelligent and semiconductor manufacturing and its related reliability science and quality engineering. Ability to solve problems and develop new processes or equipment. Students are encouraged to participate in the projects with the companies. The objective of this programme is to prepare students who wish to pursue graduate degrees or enter the workforce in the field of the semiconductor and electronics industry.

Entrance Requirements

Applicants should satisfy the General Entrance Requirements and the following programme specific entrance requirements:

  • hold a degree in engineering, science or equivalent; or
  • be a graduate member or a non-member qualified for graduate membership of professional institutions, for example, the Hong Kong Institution of Engineers (HKIE), member institutions of the Engineering Council (UK) and other recognized professional institutions; or
  • qualifications with evidence of academic and professional attainment acceptable to the University

English Proficiency Requirements

Applicants whose entrance qualification is obtained from an institution where the medium of instruction is NOT English should also fulfill the following minimum English proficiency requirement:

  • a score of 59 (revised paper-delivered test)^ or 79 (Internet-based test) in the Test of English as a Foreign Language (TOEFL)@#; or
  • an overall band score of 6.5 in International English Language Testing System (IELTS)@; or
  • a score of 450 in the Chinese mainland’s College English Test Band 6 (CET-6); or
  • other equivalent qualifications.

^ Effective from 11 April 2021, the TOEFL revised paper-delivered test is no longer offered.

@ TOEFL and IELTS scores are considered valid for two years. Applicants are required to provide their English test results obtained within the two years preceding the start of the University's application period.

# Applicants are required to arrange with the Educational Testing Service (ETS) to send their TOEFL results directly to the University. The TOEFL institution code for CityU is 3401.

In view of the recent development of COVID-19, ‘TOEFL iBT Home Edition’ and ‘IELTS Indicator’, as indicated below, are accepted as equivalent qualifications for the fulfillment of the University’s minimum English proficiency requirement for admission to TPg programmes until further notice:

  • TOEFL iBT Home Edition: a score of 79; or
  • IELTS Indicator: an overall band score of 6.5
Programme Content

You may obtain the MSc degree by either

  1. completing taught courses only, or
  2. taught courses plus the dissertation project.

Required Core Courses (12 credit units)

  • Quality and Reliability Engineering
  • Semiconductor Manufacturing and Management
  • 3D IC Stacking and Advanced Packaging
  • Semiconductor Process Equipment and Material

Programme Electives (18 credit units)

Electives (Select any six 3-CU courses OR three 3-CU courses and a 9-CU dissertation)

  • Project Management
  • Technological Innovation and Entrepreneurship
  • Dissertation
  • Quality Improvement: Systems and Methodologies
  • Intelligent Manufacturing for Engineering Managers
  • VLSI/ULSI Process Integration
  • Process Modelling and Control

For a full list of elective courses, please visit https://www.cityu.edu.hk/sye/mssm.htm

Remark: These elective courses will be offered subject to the availability of resources.

  • MSc Degree in Intelligent Semiconductor Manufacturing (30 credit units)

The full MSc degree award requires 30 credit units, with the completion of taught courses only, or taught courses plus the dissertation project.

† Combined mode: Local students taking programmes in combined mode can attend full-time (12-18 credit units per semester) or part-time (no more than 11 credit units per semester) study in different semesters without seeking approval from the University. For non-local students, they will be admitted to these programmes for either full-time or part-time studies. Non-local students must maintain the required credit load for their full-time or part-time studies and any changes will require approval from the University.