FIB-based Sample Preparation

FEI Scios DualBeam system

The FEI Scios DualBeam system is a combination of two systems: a Scanning Electron Microscope (SEM) and a Focused Ion Beam (FIB) system. While the SEM produces high resolution images of a variety of specimens in a digital format, the FIB is capable of fast and precise site-specific milling of the specimen material, revealing the structure under the surface layer, making cross sections, deposition layers, etc. The integration of both systems yields a powerful analytical tool that delivers outstanding performance for a broad range of applications. Needle-shaped specimens required for APT were fabricated by lift-outs and annular milled in a FEI Scios focused ion beam/scanning electron microscope (FIB/SEM) in APT Unit.

FEI Scios (FIB/SEM)
*SEM for high resolution imaging and analysis
*FIB for specific cross-sectioning
*Full in plane rotation and tilting up to 52°
*GIS (gas injection system): Pt & C
*CCD camera

FIB General Method


The Tip for APT Analysis