Publications in 2000
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(A) Journal Papers (* Invited) and Book Chapters (**)
Z. N. Fan, X. C. Zeng, D. T. K. Kwok, and P. K. Chu, Surface Hydrogen Incorporation and Profile Broadening Caused by Sheath Expansion in Hydrogen Plasma Immersion Ion Implantation, IEEE Transactions on Plasma Science, vol. 28, no. 2, pp. 371 375 (2000).
X. B. Tian, Z. M. Zeng, B. Y. Tang, K. Y. Fu, D. T. K. Kwok, and P. K. Chu, Properties of Titanium Nitride Fabricated on Stainless Steel by Plasma-Based Ion Implantation / Deposition, Materials Science & Engineering: A, vol. 282, pp. 164 - 169 (2000).
X. B. Tian, X. F. Wang, A. G. Liu, L. P. Wang, S. Y. Wang, B. Y. Tang, and P. K. Chu, Ion Heating Process during Plasma Immersion Ion Implantation, Acta Metallurgica Sinica (English Letters), vol. 13, no. 2, pp. 734 - 739 (2000).
X. B. Tian, Z. M. Zeng, T. Zhang. B. Y. Tang, and P. K. Chu, Medium Temperature Plasma Immersion Ion Implantation of Austenitic Stainless Steel, Thin Solid Films, vol. 366, no. 1 - 2, pp. 150 - 154 (2000).
Z. M. Zeng, P. K. Chu, X. B. Tian, B. Y. Tang, and D. T. K. Kwok, Ion Implantation into Race Surfaces of Aerospace Ball Bearings Using a Plasma Immersion Configuration, IEEE Transactions on Plasma Science, vol. 28, no. 2, pp. 394 - 402 (2000).
D. T. K. Kwok, X. C. Zeng, C. Chan, and P. K. Chu, Direct Current Plasma Immersion Ion Implantation Using a Grounded Conducting Grid, Journal of Applied Physics, vol. 87, no. 9, pp. 4094 - 4097 (2000).
T. Zhang, B. Y. Tang, Z. M. Zeng, Q. C. Chen, X. B. Tian, T. K. Kwok, P. K. Chu, O. R. Monteiro, and I. G. Brown, Macro-Particle Free Metal Plasma Immersion Ion Implantation and / or Deposition in Multifunctional Configuration, Surface and Coatings Technology, vol. 128 - 129, pp. 231 - 235 (2000).
Z. M. Zeng, B. Y. Tang, S. Y. Wang, X. B. Tian, X. F. Wang, P. K. Chu, and T. Zhang, Improvement of Tribological Properties of 9Cr18 Steel by Metal Plasma Immersion Ion Implantation, Chinese Journal of Vacuum Science and Technology, vol. 20, no. 2, pp. 77 - 80 (2000).
X. B. Tian and P. K. Chu, Direct Temperature Monitoring for Semiconductors in Plasma Immersion Ion Implantation, Review of Scientific Instruments, vol. 71, no. 7, pp. 2839 - 2842 (2000).
T. Zhang, J. D. Hou, B. Y. Tang, T. K. Kwok, Z. M. Zeng, I. G. Brown, and P. K. Chu, The Effect of Mesh Anode on Cathodic Arc in Focusing Magnetic Field, Chinese Physics, vol. 9, no. 4, pp. 279 - 283 (2000).
Z. M. Zeng, X. B. Tian, T. K. Kwok, B. Y. Tang, M. K. Fung, and P. K. Chu, Effects of Plasma Excitation Power, Sample Bias, and Duty Cycle on the Structure and Surface Properties of Amorphous Carbon Thin Films Fabricated on AISI440 Steel by Plasma Immersion Ion Implantation, Journal of Vacuum Science and Technology A, vol. 18, no. 5, pp. 2164 - 2168 (2000).
** P. K. Chu, N. W. Cheung, C. Chan, B. Mizuno, and O. R. Monteiro, Semiconductor Applications, in Handbook of Plasma Immersion Ion Implantation & Deposition (ISBN 0-471-24698-0), A. Anders (Ed.), John Wiley & Sons, New York, Chapter 11, pp. 637 - 681 (2000).
X. B. Tian, Z. M. Zeng, B. Y. Tang, T. K. Kwok, and P. K. Chu, Fast Pulsing Plasma Immersion Ion Implantation for Tribological Applications, Surface and Coatings Technology, vol. 128 - 129, pp. 226 - 230 (2000).
X. B. Tian, Z. M. Zeng, X. C. Zeng, B. Y. Tang, and P. K. Chu, Efficacy of High-Frequency, Low-Voltage Plasma Immersion Ion Implantation of Bar-Shaped Target, Journal of Applied Physics, vol. 88, no. 5, pp. 2221 - 2225 (2000).
Z. M. Zeng, T. Zhang, X. B. Tian, B. Y. Tang, T. K. Kwok, and P. K. Chu, Surface Modification of 9Cr18 Bearing Steel by Metal and Carbon Co-Plasma Immersion Ion Implantation, Surface and Coatings Technology, vol. 128 - 129, pp. 236 - 239 (2000).
** J. Matossian, G. Collins, P. K. Chu, C. Munson, and J. Mantese, Design of a PIII&D Processing Chamber, in Handbook of Plasma Immersion Ion Implantation & Deposition (ISBN 0-471-24698-0), A. Anders (Ed.), John Wiley & Sons, New York, Chapter 6, pp. 343 - 379 (2000).
X. B. Tian and P. K. Chu, Electrochemical Corrosion Properties of AISI304 Steel Treated by Low-Temperature Plasma Immersion Ion Implantation, Scripta Materialia, vol. 43, no. 5, pp. 417 - 422 (2000).
X. B. Tian, D. T. K. Kwok, and P. K. Chu, Modeling of Incident Particle Energy Distribution in Plasma Immersion Ion Implantation, Journal of Applied Physics, vol. 88, no. 9, pp. 4961 - 4966 (2000).
X. B. Tian and P. K. Chu, Modeling of the Relationship between Implantation Parameters and Implantation Dose during Plasma Immersion Ion Implantation, Physics Letters A, vol. 277, pp. 42 - 46 (2000).
M. Zhang, X. C. Zeng, P. K. Chu, R. Scholz, and C. L. Lin, Nickel Precipitation at Nanocavities in Separation by Implantation of Oxygen (SIMOX), Journal of Vacuum Science and Technology A, vol. 18, no. 5, pp. 2249 - 2253 (2000).
D. T. K. Kwok, P. K. Chu, and C. Chan, Profile Control in BF3 Plasma Doping, Journal of Applied Physics, vol. 88, no. 6, pp. 3198 - 3201 (2000).
P. K. Chu, Applied Research and Technology Commercialization at City University of Hong Kong", R&D Management, vol. 12, pp. 3 - 6 (2000).
A. P. Ho, S. W. Wu, and P. K. Chu, A Simplified Surface Photoreflectance Measurement System, Measurement Science & Technology, vol. 11, no. 9, pp. 1348 - 1351 (2000).
X. B. Tian, B. Y. Tang, and P. K. Chu, Tribological Behavior of the Modified Layers of AISI304 Stainless Steel Implanted with Low-Voltage Plasma-Source Ion Implantation, Tribology, vol. 20, no. 2, pp. 81 - 84 (2000).
Q. Y. Zhang, L. P. Wang, X. B. Tian, Y. X. Leng, B. Y. Tang, and P. K. Chu, Application of Filtered Pulsed Vacuum Arc Plasma to Deposit Al2O3 Thin Films, Journal of Korean Vacuum Society, vol. 9, no. S1, pp. 49 -55 (2000).
I. F. Husein, C. Chan, and P. K. Chu, Chemical Structure Modification of Silicone Surfaces by Plasma Immersion Ion Implantation, Journal of Materials Science Letters, vol. 19, no. 21, pp. 1883 - 1885 (2000).
Y. X. Leng, J. Y. Chen, Z. M. Zeng, X. B. Tian, P. Yang, N. Huang, Z. R. Zhou, and P. K. Chu, Properties of Titanium Oxide Biomaterials Synthesized by Titanium Plasma Immersion Ion Implantation and Reactive Ion Oxidation, Thin Solid Films, vol. 277 - 278, pp. 573 - 577 (2000).
I. F. Husein, C. Chan, S. Qin, and P. K. Chu, The Effect of High Dose Nitrogen Plasma Immersion Ion Implantation on Silicone Surfaces, Journal of Physics D: Applied Physics, vol. 33, pp. 2869 - 2874 (2000).
L. P. Wang, K. Y. Gan, X. B. Tian, B. Y. Tang, and P. K. Chu, Characteristics and Design of Metal Vacuum Arc Plasma Source Power Supply for Pulsed-Mode Plasma Immersion Ion Implantation, Review of Scientific Instruments, vol. 71, no. 12, pp. 4435 - 4437 (2000).
D. T. K. Kwok, P. K. Chu, M. M. M. Bilek, I. G. Brown, and A. Vizir, Ion Mean Charge State in a Biased Vacuum Arc Plasma Duct, IEEE Transactions on Plasma Science, vol. 28, no. 6, pp. 2194 - 2201 (2000).
H. H. Tong, Z. J. Xu, Q. C. Chen, K. Wang, Y. F. Huo, D. Ma, and P. K. Chu, Medium-Frequency Microwave Plasma Immersion Ion Implantation, Journal of Korean Vacuum Society, vol. 10, no. S1, pp. 41 - 47 (2000).
A. G. Liu, X. F. Wang, L. P. Wang, S. Y. Wang, B. Y. Tang, and P. K. Chu, Two-Dimensional Numerical Analysis of Plasma Immersion Ion Implantation of Cylindrical Bores, Acta Metallurgica Sinica (English Letters), vol. 13, no. 2, pp. 740 745 (2000).
(B) Conference Papers (* Invited)
D. T. K. Kwok, Z. M. Zeng, and P. K. Chu, A Novel Approach to Simulate the Potential at the Center Axis of Poisson's Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation Processes, Proceedings 3rd International Conference on Modeling and Simulation of Microsystems (MSM2000), San Diego, California, pp. 505 - 508, March 27 - 29, 2000.
Y. X. Leng, P. K. Chu, B. Y. Tang, J. Y. Chen, P. Yang, Z. R. Zhou, and N. Huang, Properties of Non-Stoichiometric Titanium Oxide Biomaterials Synthesized by PIII, Proceedings 27th International Conference on Metallurgical Coatings and Thin Films (ICMCTF2000), San Diego, California, Paper FP-2, p. 87, April 10 - 14, 2000.
X. B. Tian, B. Y. Tang, Z. M. Zeng, X. C. Zeng, and P. K. Chu, Direct Temperature Monitoring for Plasma Implantation of Semiconductors, Proceedings 27th International Conference on Metallurgical Coatings and Thin Films (ICMCTF2000), San Diego, California, Paper GP-15, p. 95, April 10 - 14, 2000.
X. B. Tian, Z. M. Zeng, B. Y. Tang, and P. K. Chu, Plasma Immersion Ion Implantation Treatment of AISI304 Stainless Steel Employing a Hybrid Elevated-Temperature, Low-Voltage and Ambient Temperature Process, Proceedings 27th International Conference on Metallurgical Coatings and Thin Films (ICMCTF2000), San Diego, California, Paper EP-17, p. 85, April 10 - 14, 2000.
Z. M. Zeng, X. B. Tian, B. Y. Tang, and P. K. Chu, Surface Modification of 9Cr18 Bearing Steel by Ti and C Co-Implantation and TiC Deposition in a Plasma Immersion Configuration, Proceedings 27th International Conference on Metallurgical Coatings and Thin Films (ICMCTF2000), San Diego, California, Paper EP-18, p. 85, April 10 - 14, 2000.
D. T. K. Kwok and P. K. Chu, Numerical Interpretation of Reflectance / Transmittance Difference Spectroscopy of Anisotropic Multi-Layer Thin Film, Proceedings 27th International Conference on Metallurgical Coatings and Thin Films (ICMCTF2000), San Diego, California, Paper FP-6, p. 87, April 10 - 14, 2000.
D. T. K. Kwok, P. K. Chu, M. M. M. Bilek, I. G. Brown, and A. Vizir, Computed Mean Charge State of a Biased Vacuum Arc Plasma Duct, Proceedings 27th International Conference on Metallurgical Coatings and Thin Films (ICMCTF2000), San Diego, California, Paper BP-8, p. 47, April 10 - 14, 2000.
X. C. Zeng, D. T. K. Kwok, X. B. Tian, C. Chan, and P. K. Chu, Requirements for High Voltage Power Modulator for Long-Pulse Plasma Immersion Ion Implantation, IEEE International High Voltage Workshop 2000, Newport Beach, California, April 10 - 12, 2000.
X. B. Tian, P. K. Chu, X. C. Zeng, T. K. Kwok, and Y. X. Leng, Experimental Investigation of Pulsed High-Voltage Glow Discharge for Plasma Surface Modification, IEEE International High Voltage Workshop 2000, Newport Beach, California, April 10 - 12, 2000.
X. C. Zeng, D. T. K. Kwok, C. Chan, and P. K. Chu, Investigation of High Voltage, Low Gas Pressure Glow Discharge in Direct-Current (DC) Plasma Immersion Ion Implantation, IEEE International High Voltage Workshop 2000, Newport Beach, California, April 10 - 12, 2000.
D. T. K. Kwok, A. H. P. Ho, X. C. Zeng, C. Chan, P. K. Chu, and S. P. Wong, Formation of Gallium Nitride (GaN) Transition Layer by Plasma Immersion Ion Implantation and Rapid Thermal Annealing, in Morphological and Compositional Evolution of Heteroepitaxial Semiconductor Thin Films, J. M. Millunchick, A. I. Barabasi, N. A. Modine, and E. D. Jones (Eds.), Proceedings Materials Research Society, vol. 618, pp. 309 314 (2000).
Y. Leng, N. Huang, P. Yang, J. Chen, H. Sun. P. Chu, B. Y. Tang, X. Wu, and F. Chen, The Blood Compatibility and Mechanical Properties of Ti-O / Ti-N Gradient Film, 2000 World Biomaterials Congress, Hawaii, Paper 1033, May 15 - 20, 2000.
Y. X. Leng, X. B. Tian, Z. M. Zeng, X. C. Zeng, B. Y. Tang, P. K. Chu, P. Yang, J. Y. Chen, N. Huang, and Z. R. Zhou, Fabrication of Duplex Coatings on Biomedical Titanium Alloys by Plasma Nitriding, Metal Plasma Immersion Ion Implantation, and Reactive Plasma Oxidation, Proceedings IEEE International Conference on Plasma Sciences (ICOPS2000), New Orleans, Louisiana, Paper 4P18, p. 211, Jun 4 - 7, 2000.
X. C. Zeng, D. T. K. Kwok, X. B. Tian, C. Chan, and P. K. Chu, Long-Pulse Plasma Immersion Ion Implantation Using a Grounded Conduction Grid, Proceedings IEEE International Conference on Plasma Sciences (ICOPS2000), New Orleans, Louisiana, Paper 4P15, p. 210, Jun 4 - 7, 2000.
X. B. Tian, P. K. Chu, X. C. Zeng, Y. X. Leng, D. T. K. Kwok, and B. Y. Tang, Simulation of Temperature Distribution on a Spherical Target during Plasma Immersion Ion Implantation, Proceedings IEEE International Conference on Plasma Sciences (ICOPS2000), New Orleans, Louisiana, Paper 1P04, p. 101, Jun 4 - 7, 2000.
D. T. K. Kwok and P. K. Chu, Particle-in-Cell Simulation of Plasma Immersion Ion Implantation (PIII) of Industrial Gears, Proceedings IEEE International Conference on Plasma Sciences (ICOPS2000), New Orleans, Louisiana, Paper 1P03, p. 100, Jun 4 - 7, 2000.
D. T. K. Kwok, X. C. Zeng, C. Chan, and P. K. Chu, Steady State Direct Current Plasma Immersion Ion Implantation (PIII) Using a Grounded Conducting Grid, Proceedings IEEE International Conference on Plasma Sciences (ICOPS2000), New Orleans, Louisiana, Paper 1B06, p. 88, Jun 4 - 7, 2000.
X. B. Tian, P. K. Chu, D. T. K. Kwok, L. P. Wang, and B. Y. Tang, The Effects of Treatment Temperature on the Structure and Corrosion Resistance of AISI304 Stainless Steel Treated by Low Voltage Plasma Immersion Ion Implantation, Proceedings IEEE International Conference on Plasma Sciences (ICOPS2000), New Orleans, Louisiana, Paper 4P19, p. 212, Jun 4 - 7, 2000.
D. T. K. Kwok, M. Keidar, P. K. Chu, and I. G. Brown, Computation of Multiply Charged Ion Transport in Curved Magnetic Field, Proceedings IEEE International Conference on Plasma Sciences (ICOPS2000), New Orleans, Louisiana, Paper 1P10, p. 104, Jun 4 - 7, 2000.
B. Y. Tang, X. F. Wang, S. Y. Wang, L. P. Wang, and P. K. Chu, The Characteristics of The Third Generation Multipurpose Plasma Immersion Ion Implantation Equipment, Proceedings International Symposium on Materials Science and Technology (ISMST 2000), Harbin, China, vol. 1, T. Q. Lei and Y. Y. Chen (Eds.), pp. 90 - 91, June 5 - 6, 2000.
L. P. Wang, B. Y. Tang, X. B. Tian, Y. X. Leng, and P. K. Chu, Principle and Process Window of Cerium Dioxide Thin Film Fabrication with Dual Plasma, International Symposium on Materials Science and Technology (ISMST 2000), Harbin, China, June 5 - 6, 2000.
X. B. Tian, L. P. Wang, D. T. K. Kwok, B. Y. Tang, and P. K. Chu, Capacitance of High-Voltage Cable in Plasma Immersion Ion Implantation Experiments, International Symposium on Materials Science and Technology (ISMST 2000), Harbin, China, June 5 - 6, 2000.
Q. Y. Zhang, L. P. Wang. X. B. Tian, Y. X. Leng, B. Y. Tang, and P. K. Chu, Application of Filtered Pulsed Vacuum Arc Plasma to Deposit AlN and Al2O3 Thin Films, Proceedings 7th Sino-Korean International Symposium on Thin Film Materials: Emerging Techniques for Thin Film Materials, Dalian, China, pp. 8 - 9 (2000).
X. B. Tian and P. K. Chu, Surface Modification Using Pulsed High-Voltage Glow Discharge, 5th Asia-Pacific Conference on Plasma Science & Technology / 13th Symposium on Plasma Science for Materials (APCPST2000), Dalian, China, Paper PS-02, September 10 13, 2000.
X. C. Zeng, P. K. Chu, Q. C. Chan, and H. H. Tong, Steady-State Direct-Current Plasma Immersion Ion Implantation Using an Electron Cyclotron Resonance Plasma Source, 5th Asia-Pacific Conference on Plasma Science & Technology / 13th Symposium on Plasma Science for Materials (APCPST2000), Dalian, China, Paper PS-45, September 10 13, 2000.
X. B. Tian, L. P. Wang, Q. Y. Zhang, and P. K. Chu, Influence of the Implantation Voltage on Film Thickness during Plasma Ion Implantation / Deposition (PIID) Process, 5th Asia-Pacific Conference on Plasma Science & Technology / 13th Symposium on Plasma Science for Materials (APCPST2000), Dalian, China, Paper PS-10, September 10 13, 2000.
N. Huang, Y. X. Leng, J. Wang, H. Sun, J. Y. Chen, P. Yang, G. J. Wan, and P. K. Chu, Deposition of Diamond-Like Carbon (DLC) by Metal Plasma Immersion Ion Implantation, 5th Asia-Pacific Conference on Plasma Science & Technology / 13th Symposium on Plasma Science for Materials (APCPST2000), Dalian, China, Paper O-33, September 10 13, 2000.
Q. Y. Zhang, B. Y. Tang, and P. K. Chu, Study on the Early Stage of Thin Film Growth in Pulsed Beam Deposition by Kinetic Monte Carlo Simulation, 5th Asia-Pacific Conference on Plasma Science & Technology / 13th Symposium on Plasma Science for Materials (APCPST2000), Dalian, China, Paper O-18, September 10 13, 2000.
Y. X. Leng, P. Yang, J. Y. Chen, H. Sun, J. Wang, P. Chu, and N. Huang, Fabrication of Ti-O/Ti-N Duplex Coatings on Biomedical Titanium Alloys by Plasma Immersion Ion Implantation, 5th Asia-Pacific Conference on Plasma Science & Technology / 13th Symposium on Plasma Science for Materials (APCPST2000), Dalian, China, Paper O-31, September 10 13, 2000.
J. Y. Chen, Y. X. Leng, P. Yang, H. Sun, P. Chu, and N. Huang, Synthesis and Properties of Ti-O/Ti-N Duplex Films Containing Ta*, 5th Asia-Pacific Conference on Plasma Science & Technology / 13th Symposium on Plasma Science for Materials (APCPST2000), Dalian, China, Paper O-54, September 10 13, 2000.
Y. X. Leng, P. Yang, J. Y. Chen, Z. R. Zhou, N. Huang, and P. K. Chu, Blood Compatibility of TiO2-x Films Synthesized by PIII, 2nd International Conference on Inorganic Materials, Santa Barbara, California, Paper P98, September 13 - 16, 2000.
P. Yang, J. Y. Chen, Y. X. Leng, N. Huang, B. Y. Tang, and P. K. Chu, Investigation on Structure and Properties of IBED-TIO2-x Treated by Vacuum Anneal, 2nd International Conference on Inorganic Materials, Santa Barbara, California, Paper P100, September 13 - 16, 2000.
N. Huang, Y. X. Leng, P. Yang, J. Y. Chen, B. Y. Tang, and P. K. Chu, Blood Compatibility of Diamond Like Carbon Film Synthesized by Metal Plasma Immersion Ion Implantation, 2nd International Conference on Inorganic Materials, Santa Barbara, California, Paper P101, September 13 - 16, 2000.
X. B. Tian and P. K. Chu, Combined Titanium Plasma-Assisted Low Voltage Nitrogen Implantation of AISI304 Stainless Steels in an Immersion Configuration, Proceedings 7th International Conference on Plasma Surface Engineering (PSE 2000), Garmisch-Partenkirchen, Germany, Paper Or01:8, p. 17, Sep 17 - 21, 2000.
Y. X. Leng, P. Yang, J. Y. Chen, X. B. Tian, L. P. Wang, Z. R. Zhou, N. Huang, and P. K. Chu, Fabrication of Ti-O/Ti-N Gradient Biomedical Films by Plasma Immersion Ion Implantation, Proceedings 7th International Conference on Plasma Surface Engineering (PSE 2000), Garmisch-Partenkirchen, Germany, Paper P19:1, p. 327, Sep 17 - 21, 2000.
X. B. Tian, Y. X. Leng, L. P. Wang, B. Y. Tang, and P. K. Chu, Structure and Corrosion-Resistance of AISI304 Stainless Steel Treated by Hybrid Low-Voltage / Elevated-Temperature and High-Voltage / Low-Temperature Nitrogen Plasma Immersion Ion Implantation, Proceedings 7th International Conference on Plasma Surface Engineering (PSE 2000), Garmisch-Partenkirchen, Germany, Paper P08:5, p. 220, Sep 17 - 21, 2000.
X. B. Tian, P. K. Chu, D. T. K. Kwok, L. P. Wang, and B. Y. Tang, Effects of Implantation Voltage in Plasma Immersion Ion Implantation of AISI304 Steels, 7th International Conference on Plasma Surface Engineering (PSE 2000), Garmisch-Partenkirchen, Germany, Paper P08:4, p. 219, Sep 17 - 21, 2000.
M. Zhang, C. L. Lin, and P. K. Chu, XTEM Study of Ni Gettering to H-Implantation-Induced Cavities in SOI Materials, Proceedings 13th International Conference on Ion Implantation Technology (IIT 2000), Alpbach, Austria, Paper P1-6, p. 281, September 17 22, 2000.
X. C. Zeng, D. T. K. Kwok, P. K. Chu, C. Chan, and N. W. Cheung, Steady-State Direct-Current (DC) Plasma Immersion Ion Implantation (PIII) for Planar Samples, Proceedings 13th International Conference on Ion Implantation Technology (IIT 2000), Alpbach, Austria, Paper P2-108, pp. 515 - 519, September 17 22, 2000.
* P. K. Chu, Plasma Doping: Theoretical Simulation and Use of Safer Gas, Extended Abstracts of the First International Workshop on Junction Technology, Makuhari, Japan, paper II-5, pp. 2-5-1 - 2-5-6, December 6, 2000.