The aim of this course is to provide students with the understanding of the functioning and construction of micro-sensors and micro-actuators integrated into micro electro mechanical systems (MEMS). Students will learn about design and fabrication fundamentals for MEMS, including the on-chip implementations for sensors and actuators of micron-scale dimensions. Apart from learning details of microstructure fabrication with the aid of microtooling, mechanics of silicon and thin-film materials will also be covered as well as principles of thermal micromechanics, electrostatic force, piezoresistivity, and capacitance-based detection of motion. Application examples will focus on micro-sensors (primarily of pressure and acceleration). Characteristics of some of these devices will be determined in laboratory experiments. Students will have the opportunity to discover and innovate in these domains.

For a student to pass the course, at least 30% of the maximum mark for both coursework and examination should be obtained.