MBE6005 - Micro Systems Technology | ||||||||||
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| * The offering term is subject to change without prior notice | ||||||||||
Course Aims | ||||||||||
The aim of the course is to introduce the state-of-the-art knowledge of micro systems technologies for modern manufacturing. It will enable students to understand the basic principles and develop skills in the areas of micro manufacturing, micro-electronic-mechanical systems (MEMS), sensors and actuators, micro electronics such as VLSI (very-large-scale-integration) and semiconductor manufacturing. | ||||||||||
Assessment (Indicative only, please check the detailed course information) | ||||||||||
Continuous Assessment: 100% | ||||||||||
Detailed Course Information | ||||||||||
| MBE6005.pdf | ||||||||||
Useful Links | ||||||||||
| Department of Mechanical and Biomedical Engineering | ||||||||||
