MBE6005 - Micro Systems Technology

Offering Academic Unit
Department of Mechanical and Biomedical Engineering
Credit Units
Course Duration
One semester
Equivalent Course(s)


Course Offering Term*:
Semester B 2017/18

* The offering term is subject to change without prior notice
Course Aims

The aim of the course is to introduce the state-of-the-art knowledge of micro systems technologies for modern manufacturing. It will enable students to understand the basic principles and develop skills in the areas of micro manufacturing, micro-electronic-mechanical systems (MEMS), sensors and actuators, micro electronics such as VLSI (very-large-scale-integration) and semiconductor manufacturing.

Assessment (Indicative only, please check the detailed course information)

Continuous Assessment: 100%
Detailed Course Information


Useful Links

Department of Mechanical and Biomedical Engineering