Fabricating Piezoelectric Films on Surfaces of Arbitrary Morphologies
This invention uses piezoelectric thin film fabrication, thus allowing deposition on any arbitrary morphologic surfaces. It is comprised of a series of processes, which includes sol-gel solution preparation, surface activation, solution atomization, brush or roller coating and rapid annealing.
Dr. YANG Zhengbao, Dr. LIU Shiyuan
- Piezoelectric
- Fabrication
- Multiple morphologies
- Thin film