EE3801 - Microsystems and Nanotechnology

Offering Academic Unit
Department of Electrical Engineering
Credit Units
3
Course Duration
One Semester
Pre-requisite(s)
Pre-cursor(s)
Course Offering Term*:
Semester A 2025/26

* The offering term is subject to change without prior notice
 
Course Aims

The aim of the course is to provide students with the basic theoretical knowledge, analytical skills and laboratory experience for understanding the nanofabrication technologies for producing microelectronic circuits and microsystems. Highlighted topics include patterning, etching, deposition and doping technologies for nanostructures, devices, and microsystems.


Assessment (Indicative only, please check the detailed course information)
Continuous Assessment: 60%
Examination: 40%
Examination Duration: 2 hours
To pass the course, students are required to achieve at least 30% in course work and 30% in the examination. Also, 100% laboratory attendance rate must be obtained.
 
Detailed Course Information
EE3801.pdf