The aim of this course is to provide students with the understanding of the functioning and construction of micro-sensors and micro-actuators integrated into micro electro mechanical systems (MEMS). Students will learn about design and fabrication fundamentals for MEMS, including the on-chip implementations for sensors and actuators of micron-scale dimensions. Apart from learning details of microstructure fabrication with the aid of microtooling, mechanics of silicon and thin-film materials will also be covered as well as principles of thermal micromechanics, fluidic damping, electrostatic force, piezoresistivity, and capacitance-based detection of motion. Application examples will focus on micro-mirror displays and semiconductor and optical micro-sensors (primarily of pressure and acceleration). Included are also specialized biosensors. Characteristics of some of these devices will be determined in laboratory experiments. Students will have the opportunity to discover and innovate in these domains.