Manufacturing Engineering and Engineering Management

City University of Hong Kong

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MEEM Seminar 0708_031

Fabrication Technology for Micro Systems

Abstract

Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. In order to enjoy the economy of scale, the fabrication technology of these micro systems is heavily based on well established VLSI fabrication techniques. This seminar will discuss the current status of MEMS technology, applications, and market trends. In addition, the fabrication-less (fabless) business model that allow old and new players to enter the MEMS market will also be introduced.

This seminar will also provide a preamble to the new subject on Micro System Technology (MEEM 6005) planned for 2009.

Event:	MEEM Seminar 0708_031
Date:	11 June 2008 (Wednesday)
Time:	2:30pm - 3:30pm
Venue:	Room B6605, FSE Conference Room City University of Hong Kong
Speaker:	Prof. Wai Tung Ng Department of Electrical & Computer Engineering The University of Toronto, Canada

About the Speaker

Prof. Wai Tung Ng is currently the Associate Chair of Undergraduate Studies in the Department of Electrical & Computer Engineering at the University of Toronto, Canada. He obtained his B.A.Sc., M.A.Sc., and Ph.D. degrees in Electrical Engineering from the University of Toronto in 1983, 1985 and 1990, respectively. His current research work covers a wide spectrum, ranging from semiconductor device and fabrication technology, smart power integrated circuits, power management circuit, integrated switched-mode power supplies, integrated motion control circuits, integrated class D audio power amplifiers, advanced MOS and RF BJT/HBT device designs. After he obtained his Ph.D. degree from the University of Toronto in 1990, Dr. Ng joined Texas Instruments Inc., Dallas TX to work on the design and fabrication of LDMOS power transistors for automotive applications. In 1993, Dr. Ng joined the University of Toronto where he established the Smart Power Integration & Semiconductor Devices Research Group. He has extensive experience in working with the industry to modify standard VLSI fabrication technology for smart power and radio frequency integrated circuit applications.

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Enquiry: MEEM General Office (Tel: 2788 8420   Email: mego@cityu.edu.hk )