Synthesis and Device Fabrication

1500¢XC High Vacuum 3 Zone Tube Furnace

1700¢XC Low Vacuum Single Zone Tube Furnace

ASTEX ECR Microwave Plasma CVD Chambers 1.5kW

ASTEX ECR Microwave Plasma CVD Chambers 1.5kW

ASTEX ECR Microwave Plasma CVD Chambers 5kW

Photolithography System in Clean Room, Class 100

ULVAC Multi-chambers Deposition System in Clean Room, Class 1,000

Dual Ion Beam Deposition

UHV Thermal Evaporation System 1

Hot Filament CVD System

UHV Magnetron Sputtering System

UHV Magnetron Sputtering System

Multi-Source Thermal Deposition System

RF Plasma-assisted hot filament CVD System

UHV Thermal Evaporation System 2

UHV Thermal Evaporation System 3

UHV Electron Beam Deposition System

Philips FEG TEM CM200

Nano Indenter XP

Omicron (Low Temp.) UHV Multiprobe XP, SPM

Philips FEG SEM XL30

Photoluminescence Spectroscopy

Reishaw Raman Spectroscopy 2000

Time Resolve Photoluminescent Spectroscopy

VG ESCALAB 220i-XL