MBE3115 - Microelectromechanical Systems

Offering Academic Unit
Department of Biomedical Engineering /
Department of Mechanical Engineering
Credit Units
Course Duration
One Semester
(MBE2003 or MBE2109) and (EE2917 or EE2301 or MBE2029) or equivalent
Course Offering Term*:
Semester B 2018/19

* The offering term is subject to change without prior notice
Course Aims

The aim of this course is to provide students with the understanding of the functioning and construction of micro-sensors and micro-actuators integrated into micro electro mechanical systems (MEMS). Students will learn about design and fabrication fundamentals for MEMS, including the on-chip implementations for sensors and actuators of micron-scale dimensions. Apart from learning details of microstructure fabrication with the aid of microtooling, mechanics of silicon and thin-film materials will also be covered as well as principles of thermal micromechanics, fluidic damping, electrostatic force, piezoresistivity, and capacitance-based detection of motion. Application examples will focus on micro-mirror displays and semiconductor and optical micro-sensors (primarily of pressure and acceleration). Included are also specialized biosensors. Characteristics of some of these devices will be determined in laboratory experiments. Students will have the opportunity to discover and innovate in these domains.

Assessment (Indicative only, please check the detailed course information)

Continuous Assessment: 50%
Examination: 50%
Examination Duration: 2.5 hours
Detailed Course Information


Useful Links

Department of Biomedical Engineering
Department of Mechanical Engineering