EE6615 - Nanotechnology for Devices and Microsystems

Offering Academic Unit
Department of Electrical Engineering
Credit Units
Course Duration
One semester
Course Offering Term*:
Semester A 2023/24

* The offering term is subject to change without prior notice
Course Aims

The aim of the course is to provide students with theoretical knowledge and analytical skills necessary for an in-depth understanding of the chemistry and physics of nanofabrication technologies used in microelectronics and microsystems. Highlighted topics include patterning, interconnects, and packaging technology for nanostructures, devices, and microsystems.

Assessment (Indicative only, please check the detailed course information)

Continuous Assessment: 60%
Examination: 40%
Examination Duration: 2 hours
Detailed Course Information


Useful Links

Department of Electrical Engineering